THE INDUCTIVELY COUPLED RF (RADIO-FREQUENCY) PLASMA

被引：185
|
作者：
BOULOS, MI
机构：
来源：
PURE AND APPLIED CHEMISTRY | 1985年 / 57卷 / 09期
关键词：
D O I：
10.1351/pac198557091321
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：1321 / 1352
页数：32
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