Characterization of HF cleaning of ion-implanted Si surfaces

被引：0
|
作者：
Interuniversity Microelectronics, Cent, Leuven, Belgium [1 ]
机构：
来源：
Diffus Def Data Pt B | / 271-274期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
6
引用
收藏
相关论文
共 50 条
  • [31] Deep electronic states in ion-implanted Si
    J. H. Evans-Freeman
    D. Emiroglu
    M. A. Gad
    N. Mitromara
    K. D. Vernon-Parry
    Journal of Materials Science, 2006, 41 : 1007 - 1012
  • [32] MODEL FOR AMORPHIZATION PROCESSES IN ION-IMPLANTED SI
    MOTOOKA, T
    PHYSICAL REVIEW B, 1994, 49 (23): : 16367 - 16371
  • [33] HREM EXAMINATION OF ER ION-IMPLANTED IN SI
    YAN, Y
    LI, Q
    FENG, D
    WANG, P
    SUN, HL
    MATERIALS LETTERS, 1989, 7 (12) : 445 - 448
  • [34] Deep electronic states in ion-implanted Si
    Evans-Freeman, JH
    Emiroglu, D
    Gad, MA
    Mitromara, N
    Vernon-Parry, KD
    JOURNAL OF MATERIALS SCIENCE, 2006, 41 (03) : 1007 - 1012
  • [35] CHARACTERIZATION OF ION-IMPLANTED N+ LAYERS ON TETRAHEDRICALLY TEXTURED SILICON SURFACES
    PEDULLI, L
    PASINI, A
    CORRERA, L
    RADIATION EFFECTS LETTERS, 1982, 67 (04): : 113 - 118
  • [36] THE ROLE OF SURFACE CLEANING IN THE ELLIPSOMETRIC STUDIES OF ION-IMPLANTED SILICON
    LOHNER, T
    VALYI, G
    MEZEY, G
    KOTAI, E
    GYULAI, J
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1981, 54 (3-4): : 251 - 252
  • [37] AMORPHIZATION PROCESSES IN ION-IMPLANTED SI ION SPECIES EFFECTS
    MOTOOKA, T
    HOLLAND, OW
    APPLIED PHYSICS LETTERS, 1992, 61 (25) : 3005 - 3007
  • [38] Bacterial adhesion on ion-implanted stainless steel surfaces
    Zhao, Q.
    Liu, Y.
    Wang, C.
    Wang, S.
    Peng, N.
    Jeynes, C.
    APPLIED SURFACE SCIENCE, 2007, 253 (21) : 8674 - 8681
  • [39] ION-IMPLANTED GALLIUM-ARSENIDE-PHOSPHIDE SURFACES
    ARNOLDUSSEN, TC
    GREENSTEIN, E
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (07) : 1102 - 1106
  • [40] DROPWISE CONDENSATION OF STEAM ON ION-IMPLANTED CONDENSER SURFACES
    ZHAO, Q
    BURNSIDE, BM
    HEAT RECOVERY SYSTEMS & CHP, 1994, 14 (05): : 525 - 534
12345