Energy distribution functions of ions impacted on a negatively biased substrate in an electron cyclotron resonance microwave plasma

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Dept. of Elec. and Electron. Eng., Saga University, 1 Honjo-machi, Saga 840-8502, Japan [1 ]
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Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 7 B卷 / 4393-4396期
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