New advances of microwave electron cyclotron resonance plasma technology

被引：0
|
作者：
机构：
来源：
Xi'an Dianzi Keji Daxue Xuebao | / 4卷 / 425-434期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Microwave absorption in electron cyclotron resonance plasma
    Liu, MH
    Hu, XW
    Wu, QC
    Yu, GY
    CHINESE PHYSICS LETTERS, 2000, 17 (01) : 31 - 33
  • [2] Microwave diagnostics in electron cyclotron resonance plasma sources
    Rev Sci Instrum, 2 (1384):
  • [3] Microwave techniques for electron cyclotron resonance plasma diagnostics
    Mascali, David
    Naselli, Eugenia
    Torrisi, Giuseppe
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2022, 93 (03):
  • [4] Microwave diagnostics in electron cyclotron resonance plasma sources
    Larousse, B
    Louvet, P
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (02): : 1384 - 1386
  • [5] Effect of microwave power on the electron energy in an electron cyclotron resonance plasma
    Yoon, SF
    Tan, KH
    Zhang, Q
    Rusli, M
    Ahn, J
    Valeri, L
    VACUUM, 2001, 61 (01) : 29 - 35
  • [6] A plasma source based on microwave discharge with electron cyclotron resonance
    Andreev, YA
    Zakharov, AN
    Klimov, AI
    Koshelev, VI
    Petkun, AA
    Sochugov, NS
    Sukhushin, KN
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1997, 40 (01) : 97 - 99
  • [7] Oxidation of strained Si in a microwave electron cyclotron resonance plasma
    Bera, LK
    Mukhopadhyay, M
    Ray, SK
    Nayak, DK
    Usami, N
    Shiraki, Y
    Maiti, CK
    APPLIED PHYSICS LETTERS, 1997, 70 (02) : 217 - 219
  • [8] An experimental apparatus with microwave electron-cyclotron-resonance plasma
    Poluektov, NP
    Tsargorodtsev, YP
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1996, 39 (04) : 611 - 615
  • [9] Faraday rotation of microwave fields in an electron cyclotron resonance plasma
    Douglass, SR
    Eddy, C
    Weber, BV
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1996, 24 (01) : 16 - 17
  • [10] An Experimental Apparatus with Microwave Electron-Cyclotron-Resonance Plasma
    Poluektov, N. P.
    Tsar'gorodtsev, Y. P.
    Instruments and Experimental Techniques (English Translation of Pribory I Tekhnika Eksperimenta), 1996, 39
12345