Stability of charge storage and property of charge transport of Si3N4/SiO2 double layer electret based on Si substrate

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作者
Zhang, Xiaoqing [1 ]
Xia, Zhongfu [1 ]
Pan, Yonggang [1 ]
Zhang, Yewen [1 ]
机构
[1] Tongji Univ, Shanghai, China
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摘要
Electrets
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页码:476 / 478
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