共 50 条
- [32] EFFECT OF HIGH-SPEED ELECTRONS OF DIFFERENT ENERGY ON CHARGE STORAGE IN SIO2 AND SI3N4 DIELECTRIC FILMS PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1977, 41 (02): : K151 - K154
- [33] Effects of Different Si3N4 Thicknesses on the Performance of PECVD SiO2/Si3N4 Double Layers Electrets 2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4, 2008, : 2404 - 2407
- [38] Oriented Si3N4 crystallites formed by plasma nitriding of SiO2/Si (111) substrate SURFACE & COATINGS TECHNOLOGY, 2020, 395 (395):