Analysis of threshold voltage of short channel polycrystalline silicon thin-film transistors fabricated on large grains

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作者：
Kawachi, Genshiro [1 ]
Tsuboi, Shinzo [1 ]
Okada, Takashi [1 ]
Mitani, Masahiro [1 ]
Matsumura, Masakiyo [1 ]
机构：
[1] Advanced LCD Technology Development Center Co., Ltd., 292 Yoshida-cho, Totsuka-ku, Yokohama-shi 244-0817, Japan
来源：
Journal of Applied Physics | 2006年 / 100卷 / 11期
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