Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system

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作者：
School of Electrical and Electronic Engineering, Yonsei University, Seoul [1 ]
120-749, Korea, Republic of
机构：
来源：
ICEP-IAAC - Int. Conf. Electron. Packag. iMAPS All Asia Conf. | / 638-641期
关键词：
Engineering Village;
D O I：
7111092
中图分类号：
学科分类号：
摘要：
Analytic modeling - Body Tube component - Detection capability - Manufacturability - Optical emission spectroscopies (OES) - Plasma assisted atomic layer depositions - Plasma characteristics - Plasma uniformity
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