共 50 条
- [44] Pr3Si6N11/Si3N4 Stacked High-k Gate Dielectrics with High Quality Ultrathin Si3N4 Interfacial Layers SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS, 2011, 35 (02): : 275 - 284
- [45] Tribochemical characterization of the lubrication film at the Si3N4/Si3N4 interface sliding in aqueous solutions Applied Surface Science, 1996, 92 (1-4): : 651 - 655
- [48] Modified Fowler–Nordheim tunnelling for modelling charge injection into Si3N4 in an Al/Si3N4/Si structure Applied Physics A, 2012, 109 : 539 - 545