Electrical instabilities in amorphous InGaZnO thin film transistors with Si3N4 and Si3N4/Al2O 3 gate dielectrics

被引：0
|
作者：
Kim, Yu-Mi [1 ]
Jeong, Kwang-Seok [1 ]
Yun, Ho-Jin [1 ]
Yang, Seung-Dong [1 ]
Lee, Sang-Youl [1 ]
Lee, Hi-Deok [1 ]
Lee, Ga-Won [1 ]
机构：
[1] Department of Electronics Engineering, Chungnam National University, Daejeon 305-764, Korea, Republic of
来源：
Japanese Journal of Applied Physics | 2012年 / 51卷 / 9 PART3期
关键词：
Compendex;
D O I：
09MF10
中图分类号：
学科分类号：
摘要：
Silicon compounds
引用
收藏
相关论文
共 50 条
  • [31] Crystal Structure and Magnetic Property of Si3N4/FePd/Si3N4 Thin Films
    Zhou Xin
    Ma Lei
    Liu Tao
    Guo Yong-Bin
    Wang Dao
    Dong Pei-Lin
    JOURNAL OF INORGANIC MATERIALS, 2018, 33 (08) : 909 - 913
  • [32] Comparison of AlGaN/GaN insulated gate heterostructure field-effect transistors with ultrathin Al2O3/Si3N4 bilayer and Si3N4 single layer
    Wang, CX
    Maeda, N
    Hiroki, M
    Tawara, T
    Makimoto, T
    Kobayashi, T
    Enoki, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (4B): : 2735 - 2738
  • [33] Crystalline Si3N4 thin films on Si(111) and the 4x4 reconstruction on Si3N4(0001)
    Wang, XS
    Zhai, GJ
    Yang, JS
    Cue, NS
    PHYSICAL REVIEW B, 1999, 60 (04): : R2146 - R2149
  • [34] Effect of metal oxides addition on the preparation of Si3N4 whiskers by vaporization of amorphous Si3N4
    Kawai, C
    Yamakawa, A
    CERAMICS INTERNATIONAL, 1999, 25 (04) : 297 - 302
  • [35] THIN SI3N4 FILMS ON SI WAFERS
    EBEL, MF
    EBEL, H
    BUCHNER, H
    CHABICOVSKY, R
    SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) : 322 - 323
  • [36] Growth mechanism of α-Si3N4 submicron rods prepared from amorphous Si3N4 powders
    Hu, Zunlan
    Zhu, Tianbin
    Wu, Weiwei
    Peng, Zijun
    Hu, Feng
    Xie, Zhipeng
    CERAMICS INTERNATIONAL, 2018, 44 (17) : 22003 - 22007
  • [37] SOME MECHANICAL PROPERTIES OF SI3N4/SI AND SI3N4/SIO2/SI SYSTEMS
    MACKENNA, EL
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (07) : C249 - &
  • [38] Comparison of tribological behavior between α-Sialon/Si3N4 and Si3N4/Si3N4 sliding pairs in water lubrication
    Rani, DA
    Yoshizawa, Y
    Jones, MI
    Hyuga, H
    Hirao, K
    Yamauchi, Y
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2005, 88 (06) : 1655 - 1658
  • [39] Characterization of grain alignment in Si3N4(w)/Si3N4 composites
    Zou, LH
    Park, DS
    Cho, BU
    Huang, Y
    Kim, HD
    MATERIALS LETTERS, 2004, 58 (10) : 1587 - 1592
  • [40] The Si3N4 and Si3N4/TiC layered composites by slip casting
    Yeh, CH
    Hon, MH
    CERAMICS INTERNATIONAL, 1997, 23 (04) : 361 - 366
12345