Electrical instabilities in amorphous InGaZnO thin film transistors with Si3N4 and Si3N4/Al2O 3 gate dielectrics

被引：0
|
作者：
Kim, Yu-Mi [1 ]
Jeong, Kwang-Seok [1 ]
Yun, Ho-Jin [1 ]
Yang, Seung-Dong [1 ]
Lee, Sang-Youl [1 ]
Lee, Hi-Deok [1 ]
Lee, Ga-Won [1 ]
机构：
[1] Department of Electronics Engineering, Chungnam National University, Daejeon 305-764, Korea, Republic of
来源：
Japanese Journal of Applied Physics | 2012年 / 51卷 / 9 PART3期
关键词：
Compendex;
D O I：
09MF10
中图分类号：
学科分类号：
摘要：
Silicon compounds
引用
收藏
相关论文
共 50 条
  • [1] Electrical Instabilities in Amorphous InGaZnO Thin Film Transistors with Si3N4 and Si3N4/Al2O3 Gate Dielectrics
    Kim, Yu-Mi
    Jeong, Kwang-Seok
    Yun, Ho-Jin
    Yang, Seung-Dong
    Lee, Sang-Youl
    Lee, Hi-Deok
    Lee, Ga-Won
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (09)
  • [2] ELECTRICAL CHARACTERISTICS OF HOT-PRESSED SI3N4, MGO/SI3N4 AND AL2O3/SI3N4 CERAMICS
    SHARIF, RI
    THORP, JS
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1987, 6 (06) : 686 - 688
  • [3] A crystalline Si3N4 amorphous Si3N4 composite
    Reimanis, IE
    Petrovic, JJ
    Suematsu, H
    Mitchell, TE
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1996, 79 (02) : 395 - 400
  • [4] Crystalline Si3N4/amorphous Si3N4 composite
    Los Alamos Natl Lab, Los Alamos, United States
    J Am Ceram Soc, 2 (395-400):
  • [5] Stress Relaxation in Sandwiched Si3N4/Al/Si3N4 Thin Films
    Chang, G. R.
    Ma, F.
    Ma, B.
    Xu, K. W.
    THERMEC 2009 SUPPLEMENT: 6TH INTERNATIONAL CONFERENCE ON PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, 2010, 89-91 : 91 - +
  • [6] Production of Si3N4/Si3N4 and Si3N4/Al2O3 composites by CVD coating of fine particles with ultrafine powder
    Hanabusa, T
    Uemiya, S
    Kojima, T
    CHEMICAL ENGINEERING SCIENCE, 1999, 54 (15-16) : 3335 - 3340
  • [7] INTERFACIAL REACTIONS IN THE AL/SI3N4/SI AND AU/SI3N4/SI SYSTEMS
    EDELMAN, F
    GUTMANAS, E
    BRENER, R
    INTERFACES BETWEEN POLYMERS, METALS, AND CERAMICS, 1989, 153 : 77 - 82
  • [8] Fabrication of α-Si3N4 nanobelts assembled by Si3N4 microcrystals on the nanowires via crystallization of amorphous Si3N4 powders
    Hu, Zunlan
    Ge, Yiyao
    Liu, Jian
    Xie, Zhipeng
    CERAMICS INTERNATIONAL, 2019, 45 (12) : 15758 - 15762
  • [9] Crystallization of amorphous Si3N4 and superhardness effect in HfC/Si3N4 nanomultilayers
    Li, Guanqun
    Li, Yuge
    Li, Geyang
    APPLIED SURFACE SCIENCE, 2011, 257 (13) : 5799 - 5802
  • [10] Crystallization Behavior of Amorphous Si3N4 and Effects of α-Si3N4 Crystal Seeds
    Hu Z.
    Xie Z.
    Kang G.
    Liu J.
    Yan Q.
    Kuei Suan Jen Hsueh Pao/Journal of the Chinese Ceramic Society, 2020, 48 (12): : 1920 - 1926
12345