High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes

被引：0
|
作者：
Xue, Chunan [1 ,3 ]
Yu, Jun [1 ,3 ]
Sheng, Pengfeng [1 ,2 ]
Wang, Haojie [1 ,3 ]
Wang, Zhanshan [1 ,3 ]
Wang, Dongfang [4 ]
机构：
[1] Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai,200092, China
[2] School of Mechanical Engineering, Tongji University, Shanghai,200092, China
[3] Key Laboratory of Advanced Micro-structured Materials, Ministry of Education, Tongji University, Shanghai,200092, China
[4] Optoelectronic Manufacturing Engineering Center, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai,200092, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2024年 / 32卷 / 13期
关键词：
D O I：
10.37188/OPE.20243213.2004
中图分类号：
学科分类号：
摘要：
The Wolter-type X-ray microscope, known for its high resolution and collecting area, is replacing KB-type X-ray microscopy in advanced light sources and high-energy lasers. A notable method for fabricating Wolter-type X-ray mirrors is nickel electroforming, where the surface accuracy and quality of the replication mandrel crucially impact mirror performance. Preparing the mandrel requires high-precision inspection technology, yet traditional equipment struggles to measure the circumferentially symmetric surface profile of the Wolter type. To address this challenge, we developed an offline detection device using a non-contact probe to measure the mandrel's middle and low frequency surface profile. Systematic and random errors in the detection device were analyzed, and we employed a dual-probe calibration method with a standard mirror, reducing the peak-to-valley (PV) value of drift due to temperature and humidity to 23 nm. A comparative experiment between our detection device and the CGH interferometric detection method showed a deviation of approximately 60 nm in the PV value of the surface test results for the Wolter mandrel, validating the effectiveness and accuracy of our detection method. © 2024 Chinese Academy of Sciences. All rights reserved.
引用
收藏
页码：2004 / 2016
相关论文
共 50 条
  • [41] High-precision x-ray diagnostics of laser-produced plasmas
    Renner, O
    Förster, E
    Uschmann, I
    Eidmann, K
    LASER OPTICS 2003: SUPERINTENSE LIGHT FIELDS AND ULTRAFAST PROCESSES, 2003, 5482 : 1 - 10
  • [42] High-precision x-ray spectroscopy in few-electron ions
    Le Bigot, E. O.
    Boucard, S.
    Covita, D. S.
    Gotta, D.
    Gruber, A.
    Hirtl, A.
    Fuhrmann, H.
    Indelicato, P.
    dos Santos, J. M. F.
    Schlesser, S.
    Simons, L. M.
    Stingelin, L.
    Trassinelli, M.
    Veloso, J. F. C. A.
    Wasser, A.
    Zmeskal, J.
    PHYSICA SCRIPTA, 2009, T134
  • [43] Automating High-Precision X-Ray and Neutron Imaging Applications With Robotics
    Hashem, Joseph A.
    Pryor, Mitch
    Landsberger, Sheldon
    Hunter, James
    Janecky, David R.
    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2018, 15 (02) : 663 - 674
  • [44] High-precision analogue peak detector for X-ray imaging applications
    Dlugosz, R.
    Iniewski, K.
    ELECTRONICS LETTERS, 2007, 43 (08) : 440 - 441
  • [45] Combined optical and X-ray interferometry for high-precision dimensional metrology
    Basile, G
    Becker, P
    Bergamin, A
    Cavagnero, G
    Franks, A
    Jackson, K
    Kuetgens, U
    Mana, G
    Palmer, EW
    Robbie, CJ
    Stedman, M
    Stümpel, J
    Yacoot, A
    Zosi, G
    PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2000, 456 (1995): : 701 - 729
  • [46] High-precision x-ray spectroscopy of highly charged ions with microcalorimeters
    Kraft-Bermuth, S.
    Andrianov, V.
    Bleile, A.
    Echler, A.
    Egelhof, P.
    Grabitz, P.
    Ilieva, S.
    Kilbourne, C.
    Kiselev, O.
    McCammon, D.
    Meier, J.
    PHYSICA SCRIPTA, 2013, T156
  • [47] High-Precision X-ray Total Scattering Measurements Using a High-Accuracy Detector System
    Kato, Kenichi
    Shigeta, Kazuya
    CONDENSED MATTER, 2022, 7 (01):
  • [48] The Measurement of MTFs in X-ray Microscopy Using Diffractograms
    Morrison, G. R.
    Charalambous, P. S.
    Gianoncelli, A.
    Kaulich, B.
    10TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2011, 1365 : 273 - 276
  • [49] High-precision measurement of gear tooth profile using line spectral confocal method
    Shang, Zhiyi
    Wang, Jianhua
    Du, Hubing
    Yin, Peili
    MEASUREMENT, 2023, 223
  • [50] Study of x-ray microscopy using ultraviolet and x-ray double-resonance absorption
    Iketaki, Y
    Watanabe, T
    OPTICAL ENGINEERING, 1996, 35 (08) : 2418 - 2422
12345