High-precision measurement of Wolter-I mandrel for X-ray microscopy by using double confocal probes

被引：0
|
作者：
Xue, Chunan [1 ,3 ]
Yu, Jun [1 ,3 ]
Sheng, Pengfeng [1 ,2 ]
Wang, Haojie [1 ,3 ]
Wang, Zhanshan [1 ,3 ]
Wang, Dongfang [4 ]
机构：
[1] Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai,200092, China
[2] School of Mechanical Engineering, Tongji University, Shanghai,200092, China
[3] Key Laboratory of Advanced Micro-structured Materials, Ministry of Education, Tongji University, Shanghai,200092, China
[4] Optoelectronic Manufacturing Engineering Center, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai,200092, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2024年 / 32卷 / 13期
关键词：
D O I：
10.37188/OPE.20243213.2004
中图分类号：
学科分类号：
摘要：
The Wolter-type X-ray microscope, known for its high resolution and collecting area, is replacing KB-type X-ray microscopy in advanced light sources and high-energy lasers. A notable method for fabricating Wolter-type X-ray mirrors is nickel electroforming, where the surface accuracy and quality of the replication mandrel crucially impact mirror performance. Preparing the mandrel requires high-precision inspection technology, yet traditional equipment struggles to measure the circumferentially symmetric surface profile of the Wolter type. To address this challenge, we developed an offline detection device using a non-contact probe to measure the mandrel's middle and low frequency surface profile. Systematic and random errors in the detection device were analyzed, and we employed a dual-probe calibration method with a standard mirror, reducing the peak-to-valley (PV) value of drift due to temperature and humidity to 23 nm. A comparative experiment between our detection device and the CGH interferometric detection method showed a deviation of approximately 60 nm in the PV value of the surface test results for the Wolter mandrel, validating the effectiveness and accuracy of our detection method. © 2024 Chinese Academy of Sciences. All rights reserved.
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页码：2004 / 2016
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