Structure design and numerical simulation of high-g micro accelerometer

被引：0
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作者：
Zou, Hua [1 ]
机构：
[1] School of Sciences, NUST, Nanjing 210094, China
来源：
Nanjing Li Gong Daxue Xuebao/Journal of Nanjing University of Science and Technology | 2010年 / 34卷 / 03期
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页码：319 / 322
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