Analysis and design of the sensing element of three-axis high-g MEMS accelerometer

被引：0
|
作者：
Zhang Zhenhai [1 ]
Li Kejie [1 ]
机构：
[1] Beijing Inst Technol, Natl Key Lab Mechatron Engn & Control, Beijing 100081, Peoples R China
来源：
ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS | 2007年
关键词：
high-g; sense element; three-axis; piezoresistive accelerometer; MEMS;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
On the basis of analyzing the disadvantage of other structural accelerometer, three-axis high-G MEMS, silicon, piezoresistive accelerometer was put forward in order to apply to the high-shock test field. Design and simulation of the sense element were implemented, by means of finite element analysis software, ANSYS. The accelerometer's structure and working principle were discussed in details. The structural size of the sense element was fixed by transient analysis, modal analysis and static analysis. The accelerometer can be widely applied to the high-shock test field of weapon.
引用
收藏
页码：4891 / 4894
页数：4
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