共 50 条
- [21] Modeling and Simulation of a Low Power Magnetron as an Element of Electrical System 2018 28TH INTERNATIONAL CONFERENCE RADIOELEKTRONIKA (RADIOELEKTRONIKA), 2018,
- [24] Study on the influence of the magnetron power supply on the properties of the Silicon Nitride films VIII ALL-RUSSIAN (WITH INTERNATIONAL PARTICIPATION) CONFERENCE ON LOW TEMPERATURE PLASMA IN THE PROCESSES OF FUNCTIONAL COATING PREPARATION, 2017, 789
- [26] Design of Bias Power Supply for Magnetron Sputtering with Automatic Equalization Current PROCEEDINGS OF THE 2017 INTERNATIONAL CONFERENCE ON ELECTRONIC INDUSTRY AND AUTOMATION (EIA 2017), 2017, 145 : 199 - 203
- [27] Studies on a magnetron source PRODUCTION AND NEUTRALIZATION OF NEGATIVE IONS AND BEAMS, 2002, 639 : 115 - 120
- [28] Power supply efficiency in dual magnetron large area sputter coatings Plasma Research Express, 2020, 2 (03):
- [29] MODELLING OF THE POWER SUPPLY MAGNETRON GENERATOR OF THE INDUSTRIAL PLANT OF SUPERHIGH FREQUENCY APEDE 2008: INTERNATIONAL CONFERENCE ON ACTUAL PROBLEMS OF ELECTRON DEVICES ENGINEERING, 2008, : 355 - 360
- [30] Research on A New Control Method of Pulse Magnetron Sputtering Power Supply PROCEEDINGS OF THE 36TH CHINESE CONTROL CONFERENCE (CCC 2017), 2017, : 10220 - 10223