共 50 条
- [32] High power impulse magnetron sputtering using a rotating cylindrical magnetron JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2010, 28 (01): : 108 - 111
- [35] INVESTIGATION OF THE INFLUENCE OF MAGNETRON POWER SUPPLY CHARACTERISTICS ON MICROWAVE PLASMA CHEMICAL ACTIVITY XIXTH SYMPOSIUM ON PHYSICS OF SWITCHING ARC, 2011, : 125 - 128
- [39] The magnetron amplifier and power oscillator PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1925, 13 (02): : 159 - 188
- [40] Design and simulations of medium frequency power supply for plasma processing and magnetron sputtering PRZEGLAD ELEKTROTECHNICZNY, 2022, 98 (02): : 98 - 101