Effect of rapid thermal process on oxygen precipitation in electron irradiated czochralski silicon

被引：0
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作者：
Cai, Lili [1 ]
Chen, Guifeng [2 ]
Li, Yangxian [2 ]
机构：
[1] Foundation Department, North China Institute of Science and Technology, Beijing 101601, China
[2] School of Material Science and Engineering, Hebei University of Technology, Tianjin 300130, China
来源：
Kuei Suan Jen Hsueh Pao/Journal of the Chinese Ceramic Society | 2010年 / 38卷 / 02期
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摘要：
11
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页码：196 / 200
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