A built-in vibration sensor using arc-discharged reactive ion plated PZT

被引：0
|
作者：
Optical MEMS Laboratory, Koc University, Rumelifeneri Yolu, Sariyer, Istanbul 34450, Turkey [1 ]
不详 [2 ]
不详 [3 ]
机构：
来源：
IEEJ Trans. Sens. Micromach. | / 3卷 / 128-129期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Equivalent circuits
引用
收藏
相关论文
共 50 条
  • [1] Preparation of lead zirconate titanate thick films by arc-discharged reactive ion-plating method
    Yasuda, Y
    Akamatsu, M
    Tani, M
    Yoshida, M
    Kondo, K
    Iijima, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (9B): : 5518 - 5522
  • [2] Damage localization in plate-like structure using built-in PZT sensor network
    Liu, Xinglong
    Zhou, Chengxu
    Jiang, Zhongwei
    SMART STRUCTURES AND SYSTEMS, 2012, 9 (01) : 21 - 33
  • [3] Detection of Micro-Arc Discharge Using ESC Wafer Stage With Built-In AE Sensor
    Kasashima, Yuji
    Tabaru, Tatsuo
    Kobayashi, Yoshikazu
    Yasaka, Mitsuo
    Yamaguchi, Shinsuke
    Akiyama, Morito
    Uesugi, Fumihiko
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2013, 26 (03) : 350 - 354
  • [4] A Single-Axis Vortex Gyroscope Using Built-In PZT Micropump
    Phan, Hoa Thanh
    Dau, Van Thanh
    IEEE SENSORS JOURNAL, 2023, 23 (21) : 25770 - 25778
  • [5] Passive optomechanical electric field strength sensor with built-in vibration suppression
    Kainz, A.
    Hortschitz, W.
    Steiner, H.
    Stifter, M.
    Schalko, J.
    Jachimowicz, A.
    Keplinger, F.
    APPLIED PHYSICS LETTERS, 2018, 113 (14)
  • [6] INITIAL TESTS ON A ROLLING ELEMENT BEARING WITH BUILT-IN VIBRATION SENSOR FOR CONDITION MONITORING
    Behzad, M.
    Beheshtkar, N.
    Bastami, A. R.
    Hale, J. M.
    PROCEEDINGS OF THE 17TH INTERNATIONAL CONGRESS ON SOUND AND VIBRATION, 2010,
  • [7] Aging Adaption in Integrated Circuits Using a Novel Built-In Sensor
    Wang, Xiaoxiao
    Winemberg, Leroy
    Su, Donglin
    Tran, Dat
    George, Saji
    Ahmed, Nisar
    Palosh, Steve
    Dobin, Allan
    Tehranipoor, Mohammad
    IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 2015, 34 (01) : 109 - 121
  • [8] A built-in current sensor using thin-film transistors
    Hatzopoulos, AA
    Siskos, S
    Dimitriadis, CA
    Papadopoulos, N
    Pappas, I
    Nalpantidis, L
    Second Conference on Microelectronics, Microsystems and Nanotechnology, 2005, 10 : 289 - 292
  • [9] Dispersion of High-Purity Semiconducting Arc-Discharged Carbon Nanotubes Using Backbone Engineered Diketopyrrolopyrrole (DPP)-Based Polymers
    Lei, Ting
    Pitner, Gregory
    Chen, Xiyuan
    Hong, Guosong
    Park, Steve
    Hayoz, Pascal
    Weitz, Ralf Thomas
    Wong, Hon-Sum Philip
    Bao, Zhenan
    ADVANCED ELECTRONIC MATERIALS, 2016, 2 (01):
  • [10] Design and performance evaluation of smart vibration sensor for industrial applications with built-in MEMS accelerometers
    Dosedel, Martin
    Havranek, Zdenek
    PROCEEDINGS OF THE 2018 18TH INTERNATIONAL CONFERENCE ON MECHATRONICS - MECHATRONIKA (ME), 2018, : 22 - 29
12345