Passive optomechanical electric field strength sensor with built-in vibration suppression

Methods for measuring low-frequency and static electric field strength are of great use in many areas ranging from meteorology to high-voltage infrastructure or safety. Nevertheless, all state-of-the-art methods have grave intrinsic drawbacks such as severe inherent field distortions or overpronounced temperature behavior. Recently, a method has been developed which allows for distortion-free and temperature-stable measurement. In this work, a micromechanical sensor based on this method is presented which features suspensions that suppress cross-sensitivities to vibrations. Two such types of suspensions were evaluated and compared in terms of their mechanical modes and susceptibility to electric fields and vibrations. It is shown that these suspensions indeed suppress the cross-sensitivities. The sensors exhibit field strength resolutions down to 737 V/m/root Hz with a theoretical limit as low as 59.3 V/m/root Hz. (C) 2018 Author(s).