A built-in vibration sensor using arc-discharged reactive ion plated PZT

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作者：
Optical MEMS Laboratory, Koc University, Rumelifeneri Yolu, Sariyer, Istanbul 34450, Turkey [1 ]
不详 [2 ]
不详 [3 ]
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来源：
IEEJ Trans. Sens. Micromach. | / 3卷 / 128-129期
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摘要：
Equivalent circuits
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