Properties of high-purity charge for the production of bulk single crystals of silicon carbide

被引:0
|
作者
Skvortsov D.A. [1 ]
Sidorov R.I. [1 ]
Mamin B.F. [1 ]
Neverov V.A. [1 ]
机构
[1] Ogarev Mordovia State University, 68 Bolshevistskaya st., Saransk
来源
Applied Physics | 2022年 / 06期
关键词
powder; silicon carbide; thermophysical characteristics;
D O I
10.51368/1996-0948-2022-6-76-82
中图分类号
学科分类号
摘要
The granulometric and thermophysical characteristics of SiC charge powders, as well as imported ultrapure powder (GMF-CVD, Japan) were studied. The charge was obtained by self-propagating high-temperature synthesis. It is shown that the domestic SiC dispersed material is not inferior to foreign analogues in a number of characteristics and can be successfully used for the industrial production of SiC single-crystal. Based on the research results, a technological route was developed and a bulk SiC single crystal with a diameter of 100 mm was grown on the basis of one of the synthesized powders. © 2022 Federal Informational-Analytical Center of the Defense Industry. All rights reserved.
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页码:76 / 82
页数:6
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