Transparent conducting Al-Zn-O thin films prepared by pulsed laser deposition in magnetic field perpendicular to the plume

被引：0
|
作者：
Agura, Hideaki [1 ]
Suzuki, Akio [1 ]
Aoki, Takanori [1 ]
Matsushita, Tatsuhiko [1 ]
Okinaka, Hirokazu [1 ]
Hoki, Shigeyasu [1 ]
Okuda, Masahiro [2 ]
机构：
[1] Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University, 3-1-1 Nakagaito, Daito, Osaka 574-8530, Japan
[2] Department of Physics and Electronics, College of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Sakai, Osaka 593-8531, Japan
来源：
| 2003年 / Vacuum Society of Japan卷 / 46期
关键词：
Ablation time - Crystal grain growth - Energy density;
D O I：
10.3131/jvsj.46.752
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Transparent conducting CuCr1-xMgxO2 films prepared by pulsed laser deposition
    Li, Da
    Fang, Xiaodong
    Tao, Ruhua
    Dong, Weiwei
    Deng, Zanhong
    Zhu, Xuebin
    LASERS IN MATERIAL PROCESSING AND MANUFACTURING III, 2008, 6825
  • [32] Transparent conducting ZnO:Al thin films prepared by ArF excimer laser ablation
    Mehra, RM
    Singh, AV
    Kumar, M
    Yoshida, A
    PROCEEDING OF THE TENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOLS I AND II, 2000, 3975 : 1198 - 1205
  • [33] Effects of transverse magnetic field on a laser-produced Zn plasma plume and ZnO films grown by pulsed laser deposition
    Kim, Tae Hyun
    Nam, Sang Hwan
    Park, Hye Sun
    Song, Jae Kyu
    Park, Seung Min
    APPLIED SURFACE SCIENCE, 2007, 253 (19) : 8054 - 8058
  • [34] Oxidation behavior of Cr-Al-N-O thin films prepared by pulsed laser deposition
    Hirai, M
    Saito, H
    Suzuki, T
    Suematsu, H
    Jiang, WH
    Yatsui, K
    THIN SOLID FILMS, 2002, 407 (1-2) : 122 - 125
  • [35] Structure and dielectric properties of Zr-Al-O thin films prepared by pulsed laser deposition
    Zhu, J
    Liu, ZG
    MICROELECTRONIC ENGINEERING, 2003, 66 (1-4) : 849 - 854
  • [36] Mechanism of hardening in Cr-Al-N-O thin films prepared by pulsed laser deposition
    Hirai, M
    Suzuki, T
    Suematsu, H
    Jiang, W
    Yatsui, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (04): : 947 - 954
  • [37] Surface flatness of transparent conducting ZnO:Ga thin films grown by pulsed laser deposition
    Suzuki, Akio
    Matsushita, Tatsuhiko
    Sakamoto, Yoshiaki
    Wada, Naoki
    Fukuda, Tomoya
    Fujiwara, Hideki
    Okuda, Masahiro
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (10): : 5457 - 5461
  • [38] Surface flatness of transparent conducting ZnO:Ga thin films grown by pulsed laser deposition
    Suzuki, A
    Matsushita, T
    Sakamoto, Y
    Wada, N
    Fukuda, T
    Fujiwara, H
    Okuda, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (10): : 5457 - 5461
  • [39] Electric properties and surface characterization of transparent Al-doped ZnO thin films prepared by pulsed laser deposition
    Kim, Jong-Pil
    Lee, Sang-A
    Bae, Jong Seong
    Park, Sung-Kyun
    Choi, Ung-Chan
    Cho, Chae-Ryong
    THIN SOLID FILMS, 2008, 516 (16) : 5223 - 5226
  • [40] The Properties of Zn-Doped AlSb Thin Films Prepared by Pulsed Laser Deposition
    Tang, Ping
    Wang, Weimin
    Li, Bing
    Feng, Lianghuan
    Zeng, Guanggen
    COATINGS, 2019, 9 (02):
12345