Transparent conducting Al-Zn-O thin films prepared by pulsed laser deposition in magnetic field perpendicular to the plume

被引：0
|
作者：
Agura, Hideaki [1 ]
Suzuki, Akio [1 ]
Aoki, Takanori [1 ]
Matsushita, Tatsuhiko [1 ]
Okinaka, Hirokazu [1 ]
Hoki, Shigeyasu [1 ]
Okuda, Masahiro [2 ]
机构：
[1] Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University, 3-1-1 Nakagaito, Daito, Osaka 574-8530, Japan
[2] Department of Physics and Electronics, College of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Sakai, Osaka 593-8531, Japan
来源：
| 2003年 / Vacuum Society of Japan卷 / 46期
关键词：
Ablation time - Crystal grain growth - Energy density;
D O I：
10.3131/jvsj.46.752
中图分类号：
学科分类号：
摘要：
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