Lateral silicon field-emission devices using electron beam lithography

被引：0
|
作者：
Han, Sangyeon [1 ]
Yang, Sun-A [1 ,4 ]
Hwang, Taekeun [1 ,5 ]
Lee, Jongho [2 ]
Lee, Jong Duk [3 ]
Shin, Hyungcheol [1 ]
机构：
[1] Department of Electrical Engineering, Korea Adv. Inst. Sci. and Technol., 373-1, Kusong-dong, Yusong-gu, Taejon, 305-701, Korea, Republic of
[2] School of Electrical Engineering, Wonkwang University, Iksan, Chonpuk, 570-749, Korea, Republic of
[3] School of Electrical Engineering, Seoul National University, Seoul, 151-742, Korea, Republic of
[4] Samsung Display Devices Co., Ltd., Suwon, Kyungki, 442-391, Korea, Republic of
[5] Hyundai Microelectronics Co., Ltd., Cheongju, Chungbuk, 361-480, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 5 A期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
6
引用
收藏
页码：2556 / 2559
相关论文
共 50 条
  • [41] A HIGH-VOLTAGE PULSE SOURCE FOR ELECTRON-BEAM GENERATION USING FIELD-EMISSION
    MIZUNO, A
    KAMASE, Y
    IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS, 1989, 25 (01) : 54 - 61
  • [42] Measurement of field-emission properties of a single crystal silicon emitter using scanning electron microscopy
    Cheng, T. C.
    Hsueh, H. T.
    Huang, W. J.
    Chang, M. N.
    Wu, J. S.
    Kung, S. C.
    MICROSCOPY OF SEMICONDUCTING MATERIALS, 2005, 107 : 351 - 354
  • [43] FIELD-EMISSION STUDY OF SILICON ON TUNGSTEN
    SWENSON, OF
    SINHA, MK
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (02): : 942 - +
  • [44] Theoretical research on electron beam modulation in a field-emission cold cathode electron gun
    李兴兴
    袁学松
    张宇
    鄢扬
    Chinese Physics B, 2014, 23 (03) : 554 - 558
  • [45] SILICON FIELD-EMISSION TRANSISTORS AND DIODES
    JONES, GW
    SUNE, CT
    GRAY, HF
    IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1992, 15 (06): : 1051 - 1055
  • [46] PHOTOSENSITIVE FIELD-EMISSION FROM SILICON
    THOMAS, RN
    SCHRODER, DK
    NATHANSO.HC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 85 - 85
  • [47] FIELD-EMISSION FROM SILICON EMITTERS
    JOHNSTON, R
    MILLER, AJ
    SURFACE SCIENCE, 1992, 266 (1-3) : 155 - 162
  • [48] APPLICATIONS OF ELECTRON HOLOGRAPHY USING A FIELD-EMISSION ELECTRON-MICROSCOPE
    TONOMURA, A
    JOURNAL OF ELECTRON MICROSCOPY, 1984, 33 (02): : 101 - 115
  • [49] A silicon MOSFET/field-emission array fabricated using CMP
    Hong, CY
    Akinwande, AI
    IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE, 2001, : 145 - 146
  • [50] Lateral-type field emission-based magnetic sensor fabricated by electron-beam lithography
    Lee, K
    Holbert, KE
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2004, 151 (04) : H81 - H85
12345