Synthesis and characterization of carbon nitride thin films by pulsed laser deposition using radical beam source

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[1] Ono, Kojiro
[2] Sakurada, Kunio
[3] Aoi, Yoshifumi
[4] Kamijo, Eiji
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Ono, Kojiro | 2000年 / Nihon Shinku Kyokai, Tokyo, Japan卷 / 43期
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10.3131/jvsj.43.273
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