Synthesis and characterization of carbon nitride thin films by pulsed laser deposition using radical beam source

被引：0
|
作者：
Ono, Kojiro [1 ]
Sakurada, Kunio [1 ]
Aoi, Yoshifumi [1 ]
Kamijo, Eiji [1 ]
机构：
[1] Faculty of Science and Technology, Ryukoku University, Seta, Otsu, Shiga, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 2000年 / 43卷 / 03期
关键词：
Carbon nitride - Pulsed laser deposition - Radical beam source;
D O I：
10.3131/jvsj.43.273
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
页码：273 / 276
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