Analysis research of undercutting phenomenon in wet anisotropic etching process

被引：0
|
作者：
Zhang, Han [1 ]
Li, Weihua [1 ]
机构：
[1] Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2010年 / 31卷 / 04期
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页码：944 / 950
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