Analysis research of undercutting phenomenon in wet anisotropic etching process

被引：0
|
作者：
Zhang, Han [1 ]
Li, Weihua [1 ]
机构：
[1] Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2010年 / 31卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：944 / 950
相关论文
共 50 条
  • [21] Silicon membranes fabrication by wet anisotropic etching
    Iosub, R
    Moldovan, C
    Modreanu, M
    SENSORS AND ACTUATORS A-PHYSICAL, 2002, 99 (1-2) : 104 - 111
  • [22] Anisotropic wet etching on birefringent calcite crystal
    C.M. Wang
    Y.C. Chang
    C.D. Sung
    H.T. Tien
    C.C. Lee
    J.Y. Chang
    Applied Physics A, 2005, 81 : 851 - 854
  • [23] A masking approach for anisotropic silicon wet etching
    Normand, P
    Beltsios, K
    Tserepi, A
    Aidinis, K
    Tsoukalas, A
    Cardinaud, C
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2001, 4 (10) : G73 - G76
  • [24] Novel wet anisotropic etching process for the realization of new shapes of silicon MEMS structures
    Pal, Prem
    Sato, Kazuo
    Gosalvez, Miguel A.
    Shikida, Mitsuhiro
    2007 INTERNATIONAL SYMPOSIUM ON MICRO-NANO MECHATRONICS AND HUMAN SCIENCE, VOLS 1 AND 2, 2007, : 499 - +
  • [25] New method for reduction of corner undercutting in anisotropic KOH etching, and applications to MEMS and MOEMS
    Kaou, N
    Jeannot, JC
    de Labachelerie, M
    DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 1091 - 1098
  • [26] ANISOTROPIC WET ETCHING OF ALUMINUM ELECTRODES BY AN EVACUATED ETCHING SYSTEM.
    Hara, Tohru
    Hirayama, Takeshi
    Ando, Hirofumi
    Furukawa, Masakazu
    1985, (132)
  • [27] THE MICROSCOPIC ACTIVATION ENERGY ETCHING MECHANISM IN ANISOTROPIC WET ETCHING OF QUARTZ
    Zhang, Hui
    Xing, Yan
    Zhang, Jin
    Li, Yuan
    2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018, : 471 - 474
  • [28] Shape Formation Analysis of Silicon Nanopore Fabricated by Anisotropic Wet Etching Method
    Wang, Yifan
    Chen, Qi
    Deng, Tao
    Liu, Zewen
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2017, 6 (12) : P760 - P764
  • [29] Forming Si nanocrystals on insulator by wet anisotropic etching
    Zrir, M. A.
    Kakhia, M.
    AlKafri, N.
    THIN SOLID FILMS, 2020, 696
  • [30] Study on atomistic model for simulation of anisotropic wet etching
    Shayan, Mohsen
    Merati, Amir Reza
    Arezoo, Behrooz
    Rezvankhah, Mohamad Amin
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2011, 10 (02):
12345