Effect of temperature on the chemical vapor deposition of silicon carbide coatings

被引:0
|
作者
Lu, Cui-Ying [1 ,2 ]
Cheng, Lai-Fei [1 ]
Zhao, Chun-Nian [1 ]
Zhang, Li-Tong [1 ]
Xu, Yong-Dong [1 ]
机构
[1] National Key Laboratory of Thermostructure Composite Materials, Northwestern Polytechnical University, Xi'an 710072, China
[2] Dept. of Chemical Industry and Chemistry, Yulin College, Yulin 719000, China
关键词
Compendex;
D O I
暂无
中图分类号
学科分类号
摘要
Silicon carbide
引用
收藏
页码:575 / 578
相关论文
共 50 条
  • [1] Conformal and superconformal chemical vapor deposition of silicon carbide coatings
    Huang, Jing-Jia
    Militzer, Christian
    Wijayawardhana, Charles
    Forsberg, Urban
    Pedersen, Henrik
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (05):
  • [2] Conformal and superconformal chemical vapor deposition of silicon carbide coatings
    Huang, Jing-Jia
    Militzer, Christian
    Wijayawardhana, Charles
    Forsberg, Urban
    Pedersen, Henrik
    [J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2022, 40 (05):
  • [3] COATINGS OF PYROCARBON AND SILICON-CARBIDE BY CHEMICAL VAPOR-DEPOSITION
    VOICE, EH
    [J]. CHEMICAL ENGINEER-LONDON, 1974, (292): : 785 - 792
  • [4] Preparation of silicon carbide coatings from liquid carbosilanes by chemical vapor deposition
    Li, Bin
    Zhang, Changrui
    Hu, Haifeng
    Cao, Yingbin
    Qi, Gongjin
    Liu, Rongjun
    [J]. JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 2007, 16 (06) : 775 - 778
  • [5] Preparation of Silicon Carbide Coatings from Liquid Carbosilanes by Chemical Vapor Deposition
    Bin Li
    Changrui Zhang
    Haifeng Hu
    Yingbin Cao
    Gongjin Qi
    Rongjun Liu
    [J]. Journal of Materials Engineering and Performance, 2007, 16 : 775 - 778
  • [6] Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition
    Huang, Jing-Jia
    Militzer, Christian
    Wijayawardhana, Charles A.
    Forsberg, Urban
    Pedersen, Henrik
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2023, 41 (03):
  • [7] Preparation of silicon carbide coatings from liquid carbosilane by chemical vapor deposition
    Li, Bin
    Zhang, Chang-Rui
    Hu, Hai-Feng
    [J]. Cailiao Kexue yu Gongyi/Material Science and Technology, 2007, 15 (06): : 848 - 850
  • [8] SILICON CARBIDE COATINGS BY VAPOR-PHASE REACTION AT HIGH TEMPERATURE . FUNDAMENTAL STUDIES ON CHEMICAL VAPOR DEPOSITION .1.
    KAWASHIMA, C
    SETAKA, N
    NAKAGAWA, J
    [J]. INTERNATIONAL CHEMICAL ENGINEERING, 1967, 7 (04): : 749 - +
  • [9] Deposition mechanism for chemical vapor deposition of zirconium carbide coatings
    Wang, Yiguang
    Liu, Qiaomu
    Liu, Jinling
    Zhang, Litong
    Cheng, Laifei
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2008, 91 (04) : 1249 - 1252
  • [10] The effect of the substrate on the growth of silicon carbide whiskers by chemical vapor deposition
    Lim, DC
    Choi, DJ
    [J]. JOURNAL OF CERAMIC PROCESSING RESEARCH, 2002, 3 (03): : 205 - 209