共 50 条
- [1] Conformal and superconformal chemical vapor deposition of silicon carbide coatings [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (05):
- [2] Conformal and superconformal chemical vapor deposition of silicon carbide coatings [J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2022, 40 (05):
- [3] COATINGS OF PYROCARBON AND SILICON-CARBIDE BY CHEMICAL VAPOR-DEPOSITION [J]. CHEMICAL ENGINEER-LONDON, 1974, (292): : 785 - 792
- [5] Preparation of Silicon Carbide Coatings from Liquid Carbosilanes by Chemical Vapor Deposition [J]. Journal of Materials Engineering and Performance, 2007, 16 : 775 - 778
- [6] Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2023, 41 (03):
- [7] Preparation of silicon carbide coatings from liquid carbosilane by chemical vapor deposition [J]. Cailiao Kexue yu Gongyi/Material Science and Technology, 2007, 15 (06): : 848 - 850
- [8] SILICON CARBIDE COATINGS BY VAPOR-PHASE REACTION AT HIGH TEMPERATURE . FUNDAMENTAL STUDIES ON CHEMICAL VAPOR DEPOSITION .1. [J]. INTERNATIONAL CHEMICAL ENGINEERING, 1967, 7 (04): : 749 - +
- [10] The effect of the substrate on the growth of silicon carbide whiskers by chemical vapor deposition [J]. JOURNAL OF CERAMIC PROCESSING RESEARCH, 2002, 3 (03): : 205 - 209