共 50 条
- [31] Silicon carbide films grown on silicon substrate by chemical vapor deposition [J]. SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 173 - 176
- [34] Effect of Temperature on the Deposition Rate and Bending Strength Characteristics of Chemical Vapor Deposited Silicon Carbide Using Methyltrichlorosilane [J]. COMPOSITES RESEARCH, 2018, 31 (02): : 43 - 50
- [36] UNIFORM SILICON COATINGS ON GRAPHITE BY CHEMICAL VAPOR DEPOSITION [J]. ELECTROCHEMICAL TECHNOLOGY, 1967, 5 (5-6): : 220 - &
- [38] Effect of Processing Parameters on the Microstructure of Silicon Nitride Coatings by Chemical Vapor Deposition [J]. ADVANCED SYNTHESIS AND PROCESSING TECHNOLOGY FOR MATERIALS, 2009, 66 : 175 - +
- [39] THERMODYNAMIC CALCULATIONS FOR THE CHEMICAL VAPOR DEPOSITION OF SILICON CARBIDE. [J]. 1600, (66):