Effect of temperature on the chemical vapor deposition of silicon carbide coatings

被引:0
|
作者
Lu, Cui-Ying [1 ,2 ]
Cheng, Lai-Fei [1 ]
Zhao, Chun-Nian [1 ]
Zhang, Li-Tong [1 ]
Xu, Yong-Dong [1 ]
机构
[1] National Key Laboratory of Thermostructure Composite Materials, Northwestern Polytechnical University, Xi'an 710072, China
[2] Dept. of Chemical Industry and Chemistry, Yulin College, Yulin 719000, China
关键词
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摘要
Silicon carbide
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页码:575 / 578
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