Effects of temperature on the morphology and structure of AlN films deposited by reactive magnetron sputtering

被引：0
|
作者：
Zheng, Xiao-Juan [1 ]
Wang, Juan [1 ]
Li, Shan-Feng [1 ]
Zhang, Qing-Yu [1 ]
机构：
[1] Lab. of Mat. Modification, Dalian Univ. of Technol., Dalian 116024, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2005年 / 36卷 / 01期
关键词：
Silicon substrates - Surface morphology - Temperature effects;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：93 / 96
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