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- [43] Reactive ion etch-induced effects on 0.2 μm T-gate In0.52Al0.48As/In0.53Ga0.47As/InP high electron mobility transistors Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1996, 14 (06):
- [48] Reactive ion etch-induced effects on 0.2 mu m T-gate In0.52Al0.48As/In0.53Ga0.47As/InP high electron mobility transistors JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 3679 - 3683