Fabrication of magnetic tunnel junctions with amorphous CoFeSiB for the bio-magnetic field sensor devices

被引:0
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作者
Kato, Daiki [1 ]
Oogane, Mikihiko [1 ]
Fujiwara, Kosuke [1 ]
Nishikawa, Takuo [2 ]
Naganuma, Hiroshi [1 ]
Ando, Yasuo [1 ]
机构
[1] Department of Applied Physics, Graduate School of Engineering, Tohoku University, Japan
[2] KOnica Minolta Inc, Corporate R and D Headquarters, United States
关键词
Cobalt compounds - Magnetic anisotropy - Fabrication - Tunnelling magnetoresistance - Magnetic devices - Silicon compounds - Boron compounds - Magnetic sensors - Tunnel junctions;
D O I
10.11239/jsmbe.52.O-504
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