Characterization of overgrown GaN layers on nano-columns grown by RF-molecular beam epitaxy

被引：0
|
作者：
Kusakabe, Kazuhide [1 ]
Kikuchi, Akihiko [1 ]
Kishino, Katsumi [1 ]
机构：
[1] Dept. of Elec. and Electronics Eng., Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102-8554, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2001年 / 40卷 / 3 A期
关键词：
Air gap structure - Nanocolumns - Overgrown gallium nitride layers;
D O I：
10.1143/jjap.40.l192
中图分类号：
学科分类号：
摘要：
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