Characterization of overgrown GaN layers on nano-columns grown by RF-molecular beam epitaxy

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作者
Kusakabe, Kazuhide [1 ]
Kikuchi, Akihiko [1 ]
Kishino, Katsumi [1 ]
机构
[1] Dept. of Elec. and Electronics Eng., Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102-8554, Japan
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关键词
Air gap structure - Nanocolumns - Overgrown gallium nitride layers;
D O I
10.1143/jjap.40.l192
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