Glow discharge mass spectroscopy study of ion concentrations of joints in anodic bonding of borosilicate glass to ultrathin silicon

被引：0
|
作者：
Itoh, Takaki [1 ]
机构：
[1] Industrial Technology Center of Wakayama Prefecture, 60, Ogura, Wakayama, Wakayama,649-6261, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2016年 / 136卷 / 11期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Mass spectrometry
引用
收藏
页码：478 / 481
相关论文
共 47 条
  • [31] INCORPORATION OF -OH RADICALS IN ANODIC SILICON-OXIDE FILMS STUDIED BY SECONDARY-ION MASS-SPECTROSCOPY, X-RAY PHOTOELECTRON-SPECTROSCOPY AND IR ANALYSIS
    MONTERO, I
    GALAN, L
    DELACAL, E
    ALBELLA, JM
    PIVIN, JC
    THIN SOLID FILMS, 1990, 193 (1-2) : 325 - 332
  • [32] Detailed study on anodic bonding process between glass and SiNx deposited silicon substrate and its application on wafer-level AFM probe array integration
    Hsieh, GW
    Tsai, CH
    Lin, WC
    Liang, CC
    PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 607 - 610
  • [33] Inhomogeneous Degradation of Graphite Anodes in Li-Ion Cells: A Postmortem Study Using Glow Discharge Optical Emission Spectroscopy (GD-OES)
    Ghanbari, Niloofar
    Waldmann, Thomas
    Kasper, Michael
    Axmann, Peter
    Wohlfahrt-Mehrens, Margret
    JOURNAL OF PHYSICAL CHEMISTRY C, 2016, 120 (39): : 22225 - 22234
  • [34] Surface Film Formation and Dissolution in Si/C Anodes of Li-Ion Batteries: A Glow Discharge Optical Emission Spectroscopy Depth Profiling Study
    Richter, Karsten
    Waldmann, Thomas
    Kasper, Michael
    Pfeifer, Claudia
    Memm, Michaela
    Axmann, Peter
    Wohlfahrt-Mehrens, Margret
    JOURNAL OF PHYSICAL CHEMISTRY C, 2019, 123 (31): : 18795 - 18803
  • [35] Cathodic and anodic glow discharge silicon-carbon alloys (a-Si1-xCx:H) from x=0.5 to 1: A comparative study by photoemission (UPS) and photoluminescence (PL)
    Alvarez, F
    Rovira, PI
    Bormioli, M
    Souto, S
    Tessler, LR
    Camargo, SS
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 198 : 628 - 631
  • [36] CHEMICAL CHARACTERIZATION OF INDUSTRIAL STEEL AND ALUMINUM SHEET SURFACES BY SECONDARY ION MASS-SPECTROMETRY, GLOW-DISCHARGE OPTICAL SPECTROSCOPY AND OTHER SURFACE-SENSITIVE TECHNIQUES
    JANSSEN, E
    MATERIALS SCIENCE AND ENGINEERING, 1980, 42 (1-2): : 309 - 320
  • [37] Comparative study of the oxidation of thin porous silicon layers studied by reflectometry, spectroscopic ellipsometry and secondary ion mass spectroscopy
    Fried, M
    Polgár, O
    Lohner, T
    Strehlke, S
    Levy-Clement, C
    JOURNAL OF LUMINESCENCE, 1998, 80 (1-4) : 147 - 152
  • [38] Comparative study of the oxidation of thin porous silicon layers studied by reflectometry, spectroscopic ellipsometry and secondary ion mass spectroscopy
    Fried, M
    Polgár, O
    Lohner, T
    Strehlke, S
    Levy-Clement, C
    LIGHT EMISSION FROM SILICON: PROGRESS TOWARDS SI-BASED OPTOELECTRONICS, 1999, 77 : 147 - 152
  • [39] Cathodic and anodic glow discharge silicon-carbon alloys (a-Si1-xCx:H) from x = 0.5 to 1: a comparative study by photoemission (UPS) an d photoluminescence (PL)
    Alvarez, F.
    Rovira, P.I.
    Bormioli, M.
    Souto, S.
    Tessler, L.R.
    Camargo Jr., S.S.
    Journal of Non-Crystalline Solids, 1996, 198-200 (pt 2): : 628 - 631
  • [40] Characterization of interfaces of directly bonded silicon wafers: a comparative study of secondary ion mass spectroscopy multiple internal reflection spectroscopy, and transmission electron microscopy
    Reiche, Manfred
    Hopfe, Sigrid
    Goesele, Ullrich
    Strutzberg, Hartmut
    Tong, Qin-Yi
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (4 A): : 2102 - 2107
12345