Glow discharge mass spectroscopy study of ion concentrations of joints in anodic bonding of borosilicate glass to ultrathin silicon

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作者：
Itoh, Takaki [1 ]
机构：
[1] Industrial Technology Center of Wakayama Prefecture, 60, Ogura, Wakayama, Wakayama,649-6261, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2016年 / 136卷 / 11期
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摘要：
Mass spectrometry
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页码：478 / 481
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