Study of the mechanical behavior of plasma-deposited silica films on polycarbonate and steel

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作者：
机构：
[1] Hofrichter, A.
[2] Constantinescu, A.
[3] Benayoun, S.
[4] Bulkin, P.
[5] Drévillon, B.
来源：
Hofrichter, A. | 2012年 / American Inst of Physics, Woodbury, NY, United States卷 / 18期
关键词：
Elastic moduli - Finite element method - Plasma enhanced chemical vapor deposition - Polycarbonates - Protective coatings - Silica - Silicon - Stainless steel - Strain - Stress analysis - Stress concentration - Vickers hardness testing;
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摘要：
Amorphous hydrogenated silica films were plasma-deposited on polycarbonate, stainless steel, and silicon. Macroindentation tests and finite element modeling were performed to study the mechanical properties of the films. About 4 GPa was found to be the yield limit of the plasma-deposited films.
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