Aging of Plasma-Deposited Films Prepared from Organic Monomers

被引：25
|
作者：
Swaraj, Sufal [1 ]
Oran, Umut [1 ]
Lippitz, Andreas [1 ]
Friedrich, Joerg F. [1 ]
Unger, Wolfgang E. S. [1 ]
机构：
[1] Bundesanstalt Mat Forsch & Prufung BAM, WG VI Thin Film & Surface Anal 43, D-12203 Berlin, Germany
来源：
PLASMA PROCESSES AND POLYMERS | 2007年 / 4卷
关键词：
ESCA/XPS; NEXAFS; plasma copolymer; plasma polymerization;
D O I：
10.1002/ppap.200731905
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Plasma-deposited polymer films were prepared from organic molecules and investigated using near edge X-ray absorption fine structure (NEXAFS) and X-ray photoelectron spectroscopy (XPS) for aging effects after exposure to air. Results from the investigation of homopolymers are summarized. Primarily the effect of the deposition parameters duty cycle and power are dealt with. The effect of the deposition parameter pressure is briefly discussed. An example to show the effect of feed gas composition on the aging of plasma polymerized ethylene/allyl alcohol and styrene/allyl alcohol copolymer is also given. In general, change in content of unsaturated or aromatic species, change in concentration of monomer functionality, and change in the oxygen content was observed in the plasma polymerized films on aging.
引用
收藏
页码：S784 / S789
页数：6
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