Influence of tip wear on atomic force acoustic microscopy experiments

被引:0
|
作者
Kopycinska-Müler, Mulgorzata [1 ]
Geiss, Roy H. [1 ]
Rice, Paul [1 ]
Hurley, Donna C. [1 ]
机构
[1] Materials Reliability Division, National Institute of Standards and Technology, Boulder, CO 80303-3328, United States
来源
Mater Res Soc Symp Proc | 1600年 / 146-151期
关键词
Compendex;
D O I
2004 MRS Fall Meeting
中图分类号
学科分类号
摘要
Acoustic variables measurement - Atomic force microscopy - Elastic constants - Mathematical models - Scanning electron microscopy
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