Research Progress of Flexible Hard Coating Deposited by Deep Oscillating Magnetron Sputtering

被引：0
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作者：
Wang, Haoqi [1 ,2 ]
Zhou, Qian [1 ]
Sun, Li [1 ]
Ou, Yixiang [1 ,2 ,3 ]
Jin, Xiaoyue [2 ]
Zhang, Xu [1 ]
Hua, Qingsong [1 ]
Pang, Pan [2 ]
Luo, Jun [2 ]
Chen, Lin [2 ]
Liao, Bin [1 ]
Ouyang, Xiaoping [4 ]
Bao, Manyu [5 ]
机构：
[1] Key Laboratory of Ray Beam Technology, Ministry of Education, Institute of Nuclear Science and Technology, Beijing Normal University, Beijing,100875, China
[2] Beijing Radiation Center, Beijing,100875, China
[3] Changzhi Medical College, Changzhi,046000, China
[4] Institute of Northwest Nuclear Physics, Xi'an,710024, China
[5] Beijing Jinlunkuntian Special Machine Co., Ltd, Beijing,100083, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2021年 / 50卷 / 08期
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页码：2993 / 3002
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