Research Progress of Flexible Hard Coating Deposited by Deep Oscillating Magnetron Sputtering

被引：0

作者：

Wang, Haoqi ^{[1
,2
]}

Zhou, Qian ^{[1
]}

Sun, Li ^{[1
]}

Ou, Yixiang ^{[1
,2
,3
]}

Jin, Xiaoyue ^{[2
]}

Zhang, Xu ^{[1
]}

Hua, Qingsong ^{[1
]}

Pang, Pan ^{[2
]}

Luo, Jun ^{[2
]}

Chen, Lin ^{[2
]}

Liao, Bin ^{[1
]}

Ouyang, Xiaoping ^{[4
]}

Bao, Manyu ^{[5
]}

机构：

[1] Key Laboratory of Ray Beam Technology, Ministry of Education, Institute of Nuclear Science and Technology, Beijing Normal University, Beijing,100875, China

[2] Beijing Radiation Center, Beijing,100875, China

[3] Changzhi Medical College, Changzhi,046000, China

[4] Institute of Northwest Nuclear Physics, Xi'an,710024, China

[5] Beijing Jinlunkuntian Special Machine Co., Ltd, Beijing,100083, China

来源：

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2021年 / 50卷 / 08期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：2993 / 3002

共 50 条

[11] Hard carbon coatings deposited by pulsed high current magnetron sputtering
K. V. Oskomov
A. A. Solov’ev
S. V. Rabotkin
Technical Physics, 2014, 59 : 1811 - 1814
[12] The High Temperature Wear Performance of TiN Coating Deposited by Magnetron Sputtering
Feng, Changjie
Chen, En
Wu, Namei
PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON CIVIL ENGINEERING AND TRANSPORTATION 2015, 2016, 30 : 1604 - 1608
[13] High temperature Oxidation Studies of Al Coating Deposited by Magnetron Sputtering
Lou jin
Ruan Cheng-xiang
MATERIALS SCIENCE AND PROCESSING, ENVIRONMENTAL ENGINEERING AND INFORMATION TECHNOLOGIES, 2014, 665 : 63 - 67
[14] Wear, erosion and corrosion resistance of CrTiAlN coating deposited by magnetron sputtering
Yang, Q.
Zhao, L. R.
Cai, F.
Yang, S.
Teer, D. G.
SURFACE & COATINGS TECHNOLOGY, 2008, 202 (16): : 3886 - 3892
[15] Growth of hard metal films by deep oscillation magnetron sputtering
Li, Y. G.
Chen, C. L.
Liu, W. Y.
Li, L.
SURFACE ENGINEERING, 2023, 39 (05) : 584 - 590
[16] Recent Progress on High-Entropy Films Deposited by Magnetron Sputtering
El Garah, Mohamed
Briois, Pascal
Sanchette, Frederic
CRYSTALS, 2022, 12 (03)
[17] Flexible Amorphous Hybrid Barrier Films Deposited by RF Magnetron Sputtering
Liang, Chih-Hao
Chau, Joseph Lik Hang
Pan, Alfred I-Tsung
Yang, Chih-Chao
Shih, Hsi-Hsin
SCIENCE OF ADVANCED MATERIALS, 2015, 7 (03) : 504 - 508
[18] Hard yet tough CrN/Si3N4 multilayer coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering
Ou, Y. X.
Ouyang, X. P.
Liao, B.
Zhang, X.
Zhang, S.
APPLIED SURFACE SCIENCE, 2020, 502
[19] Flexible hard (Zr, Si) alloy films prepared by magnetron sputtering
Musil, Jindrich
Ciperova, Zuzana
Cerstvy, Radomir
Haviar, Stanislav
THIN SOLID FILMS, 2019, 688
[20] PRODUCTION AND CHARACTERIZATION OF Cr AND CrN HARD COATINGS DEPOSITED BY UNBALANCED MAGNETRON SPUTTERING
Lopez, Monica B.
MOMENTO-REVISTA DE FISICA, 2013, (46): : 38 - 50

← 1 2 3 4 5 →