Investigation of the mechanism and model about Ni based ohmic contacts to n-type SiC

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Guo, Hui [1 ,2 ]
Zhang, Yimen [1 ,2 ]
Zhang, Yuming [1 ,2 ]
Lu, Hongliang [1 ,2 ]
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[1] Microelectronic School, Xidian University, Xi'an 710071, China
[2] Key Lab. of Wide Band-gap Semiconductor Materials and Devices, Xi'an 710071, China
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页码:42 / 45
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