Ohmic contacts to n-type SiC: Influence of Au and Ta intermediate layers

In this study, the optimization of metal-semiconductor contacts to reduce the contact resistance of ohmic contacts on n-type 4H-SiC. The commonly used Ni/Au metal scheme served as a reference. We introduced two novel metal schemes: (i) incorporating a thin interfacial Au layer (2 nm) into Ni/Au, resulting in Au/Ni/Au, and (ii) introducing a thin intermediate barrier layer of Ta (20 nm) into Ni/Au, resulting in Ni/Ta/Au. Rapid thermal annealing (RTA) is performed at different temperatures and durations and the electrical characteristics of the contacts are measured. X-ray diffraction analysis was employed to investigate the intermediate phases formed during annealing. In the Au/Ni/Au metal scheme, the presence of Au at the interface promoted the formation of additional phases of nickel-silicide (Ni3Si 3 Si and Ni3Si2). 3 Si 2 ). Compared to the traditional Ni/Au scheme, the modified metal schemes led to lower surface roughness and reduced contact resistance. Specific contact resistivity values are calculated, 2.2 x 10-5-5 S2-cm2 2 for Ni/Au, 1.37 x 10-5-5 S2-cm2 2 for Au/Ni/Au, and 4.84 x 10-5-5 S2-cm2 2 for Ni/ Ta/Au. This research offers valuable insights for the selection of metal schemes in designing ohmic contacts on ntype SiC, with potential applications in various semiconductor device technologies.