EFFECTS OF MISFIT DISLOCATIONS AND THERMALLY INDUCED STRAIN ON THE FILM PROPERTIES OF HETEROEPITAXIAL GAAS ON SI

被引:37
|
作者
LUM, RM [1 ]
KLINGERT, JK [1 ]
BYLSMA, RB [1 ]
GLASS, AM [1 ]
MACRANDER, AT [1 ]
HARRIS, TD [1 ]
LAMONT, MG [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.342004
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:6727 / 6732
页数:6
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