APPROXIMATE SHALLOW EMITTER PHOSPHORUS DIFFUSION PROFILES DURING BASE DIFFUSION ENHANCEMENT IN SILICON

被引：0

|

作者：

JAIN, RK ^{[1
]}

机构：

[1] INST VENEZOLANO INVEST CIENT,ELECTR LAB,CARACAS,VENEZUELA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 03期

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D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：C145 / C145

页数：1

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