PHOSPHORUS DIFFUSION FOR SILICON TRANSISTORS

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作者：

KUPER, AB

EDWARDS, R

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1964年 / 111卷 / 03期

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中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

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页码：C59 / C59

页数：1

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