PHOSPHORUS DIFFUSION IN POLYCRYSTALLINE SILICON

被引：21

|

作者：

LOSEE, DL

LAVINE, JP

TRABKA, EA

LEE, ST

JARMAN, CM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.333166

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1218 / 1220

页数：3

相关论文

共 50 条

[1] DIFFUSION CHARACTERISTICS OF BORON AND PHOSPHORUS IN POLYCRYSTALLINE SILICON
BUONAQUISTI, AD
CARTER, W
HOLLOWAY, PH
[J]. THIN SOLID FILMS, 1983, 100 (03) : 235 - 248
[2] GRAIN-BOUNDARY DIFFUSION OF PHOSPHORUS IN POLYCRYSTALLINE SILICON
HOLLOWAY, PH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01): : 19 - 22
[3] GRAIN-BOUNDARY DIFFUSION OF PHOSPHORUS IN POLYCRYSTALLINE SILICON
MURTI, MR
REDDY, KV
[J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1989, 4 (08) : 622 - 625
[4] GRAIN-BOUNDARY DIFFUSION OF PHOSPHORUS IN POLYCRYSTALLINE SILICON - COMMENT
MATARE, HF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (01): : 107 - 107
[5] IMPROVEMENT OF DIFFUSION LENGTH IN POLYCRYSTALLINE PHOTOVOLTAIC SILICON BY PHOSPHORUS AND CHLORINE GETTERING
JASTRZEBSKI, L
HENLEY, W
SCHIELEIN, D
LAGOWSKI, J
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (11) : 3869 - 3872
[6] GRAIN-BOUNDARY DIFFUSION AND SEGREGATION OF CARBON AND PHOSPHORUS IN POLYCRYSTALLINE SILICON
CHARI, A
AUCOUTURIER, M
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : C118 - C118
[7] DIFFUSION OF ARSENIC IN POLYCRYSTALLINE SILICON
SWAMINATHAN, B
SARASWAT, KC
DUTTON, RW
KAMINS, TI
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (09) : 795 - 798
[8] DIFFUSION OF IMPURITIES IN POLYCRYSTALLINE SILICON
KAMINS, TI
MANOLIU, J
TUCKER, RN
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (01) : 83 - &
[9] DIFFUSION OF PHOSPHORUS IN SILICON
KOOI, E
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (09) : C216 - C216
[10] DIFFUSION OF PHOSPHORUS INTO SILICON
MAEKAWA, S
[J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1962, 17 (10) : 1592 - &

← 1 2 3 4 5 →